13E063MIN - Microelectronics and Nanoelectronics

Course specification
Course title Microelectronics and Nanoelectronics
Acronym 13E063MIN
Study programme Electrical Engineering and Computing
Type of study bachelor academic studies
Lecturer (for classes)
Lecturer/Associate (for practice)
Lecturer/Associate (for OTC)
    ESPB 6.0 Status mandatory
    Condition none
    The goal Introducing students to the design and fabrication of microelectronic and nanoelectronic devices and monolithic integrated circuits. Students should get familiar with functional characteristics of microelectronic and nanoelectronic devices.
    The outcome Students should master fundamentals of planar processes and nanotechnologies, as well as basic principles of bipolar and unipolar silicon devices, heterostructures and nanoelectronic devices.
    URL to the subject page
    URL to lectures
    Contents of lectures Planar processes: diffusion, ion implantation, thermal oxidation, deposition, epitaxy, metallization, lithography, etching and chemical-mechanical planarization. Fabrication of bipolar and MOS transistor. Effects in small geometry transistors. Moore's law. MESFET. Basics of nanotechnology. Nanostructures. HEMT. HBT. Resonant tunneling diode. Graphene and carbon nanotube based devices.
    Contents of exercises Solving selected problems.
    1. "Mikroelektronika i nanoelektronika-predavanja", M. Tadić, 2011, (Original title)
    2. M. Tadic, R. Ramovic, "Problems in Microelectronics", Akademska misao ETF, Belgrade, 2000.
    3. M. Quirk, J. Serda, "Semiconductor Manufacturing Technology", Pearson, 2001. (Original title)
    4. R. S. Muller and T. I. Kamins, "Device Electronics for Integrated Circuits", Wiley, 2003. (Original title)
    5. G. W. Hanson, "Fundamentals of Nanoelectronics", Prentice Hall, 2007. (Original title)
    Number of hours per week during the semester/trimester/year
    Lectures Exercises OTC Study and Research Other classes
    3 2
    Methods of teaching lectures, problem-solving classes, demonstrations
    Knowledge score (maximum points 100)
    Pre obligations Points Final exam Points
    Activites during lectures 0 Test paper 50
    Practical lessons 0 Oral examination 0
    Colloquia 50
    Seminars 0