OF3MIN - Microelectronics and Nanoelectronics

Course specification
Course title Microelectronics and Nanoelectronics
Acronym OF3MIN
Study programme Electrical Engineering and Computing
Module Physical Electronics
Type of study bachelor academic studies
Lecturer (for classes)
Lecturer/Associate (for practice)
Lecturer/Associate (for OTC)
    ESPB 6.0 Status mandatory
    Condition none
    The goal Introduce students to the principles of design and manufacturing of microelectronic and nanoelectronic devices and monolithic integrated circuits. Introduce students to the operational characteristics of microelectronic and nanoelectronic devices.
    The outcome Gaining basic knowledge in planar processes, nanotechnology, bipolar and unipolar silicon devices, heterostructure devices, and nanoelectronic devices.
    Contents of lectures Planar processes: diffusion, ion implantation, thermal oxidation, deposition, epitaxy, metallization, lithography, etching, and chemical-mechanical planarization. Fabrication of bipolar and MOS transistor. Effects in transistors of reduced dimensions. Moore’s law. MESFET. Fundamentals of nanotechnology. Nanostructures. HEMT. HBT. Resonant tunneling diode. Graphene and carbon nanotube devices.
    Contents of exercises Solving the selected problems.
    1. "Lectures on Microelectronics and Nanoelectronics", M. Tadić, 2011,
    2. M. Tadić, R. Ramović, "Collection of problems in microelectronics", Akademic mind-ETF, Belgrade, 2000.
    3. M. Quirk, J. Serda, "Semiconductor Manufacturing Technology", Pearson, 2001. (Original title)
    4. R. S. Muller and T. I. Kamins, "Device Electronics for Integrated Circuits", Wiley, 2003. (Original title)
    5. G. W. Hanson, "Fundamentals of Nanoelectronics", Prentice Hall, 2007. (Original title)
    Number of hours per week during the semester/trimester/year
    Lectures Exercises OTC Study and Research Other classes
    3 2
    Methods of teaching lectures, problem-solving classes, demonstrations
    Knowledge score (maximum points 100)
    Pre obligations Points Final exam Points
    Activites during lectures 0 Test paper 50
    Practical lessons 0 Oral examination 0
    Projects 0
    Colloquia 50
    Seminars 0