13E064MEMS - Microelectromechanical Systems

Course specification
Course title Microelectromechanical Systems
Acronym 13E064MEMS
Study programme Electrical Engineering and Computing
Type of study bachelor academic studies
Lecturer (for classes)
Lecturer/Associate (for practice)
Lecturer/Associate (for OTC)
    ESPB 6.0 Status elective
    Condition none
    The goal To introduce students to fundamental concepts of micro - and nanofabrication, micro - and nanosystems. To explain pertinent methods of modeling, simulation, fabrication, characterization and application. Introduction into modern trends related with sensors and actuators on micrometer and submicrometer level and into fundamental concepts of microsystem technologies and nanotechnologiy.
    The outcome To be acquainted with MEMS and technologies for their fabrication. Developing skills for applying MEMS in various fields, especially in industry, information technology, and biomdeicine. To be acquainted with the modern trends and current problems in this field.
    URL to the subject page
    URL to lectures
    Contents of lectures Introduction. MEMS, NEMS, MOEMS, MST. Materials for MEMS fabrication. MEMS fabrication technologies. Volume and surface micromachining. LIGA process. MEMS control. Concept of electrical and mechanical modeling. Electrostatic sensors and actuators. Thermal sensors and actuators. Piezoelectric sensors and actuators. Magnetic actuators. Microfluidics. Optical MEMS. Numerical modeling of MEMS devices.
    Contents of exercises Practices in MEMS modeling and design.
    1. Z. Jakšić, Uvod u MEMS, Skripta, 2007.
    2. Chang Liu, Foundations of MEMS, Pearson Education, Inc., 2006.
    3. M. Madou, Fundamentals of Microfabrication, CRC Press, 2002,
    4. Mohamed Gad-el-Hak (Ed.), "MEMS: Introduction and Fundamentals", Taylor & Francis Group, LLC, 2006.
    5. Sergey Edward Lyshevski (Ed.), "Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering", CRC Press, 2004.
    Number of hours per week during the semester/trimester/year
    Lectures Exercises OTC Study and Research Other classes
    3 2
    Methods of teaching lectures, problem-solving classes, demonstrations
    Knowledge score (maximum points 100)
    Pre obligations Points Final exam Points
    Activites during lectures 0 Test paper 35
    Practical lessons 0 Oral examination 0
    Colloquia 35
    Seminars 30