13D061PPST - Applications of Plasmas in Modern Technologies Electronics and Materials Science

Course specification
Course title Applications of Plasmas in Modern Technologies Electronics and Materials Science
Acronym 13D061PPST
Study programme Electrical Engineering and Computing
Module Nanoelectronics and Photonics
Type of study doctoral studies
Lecturer (for classes)
    Lecturer/Associate (for practice)
      Lecturer/Associate (for OTC)
        ESPB 9.0 Status elective
        The goal To form a basis of knowledge and tools for understanding applications of low temperature collisional plasmas on the basis of elementary collisional and transport processes. The point of the course is not to develop theoretical evaluations but to discuss the physical content of equations, principles of operation on the basis of elementary microscopic processes and principles of applications.
        The outcome To get students acquainted with the modern physics of non-equilibrium plasmas, elementary processes, theory and diagnostics of plasma. To get acquainted with the current applications, such as in micro electronics, plasma medicine, nanotechnologies and many more, to understand the main elementary collision and transport mechanisms and how to optimize them to achieve a certain application.
        Contents of lectures 1. Elementary collisional processes of electrons and heavy particles, surface collisions 2. Transport and swarms 3. Breakdown, DC Plasmas, RF plasmas, non-equilibrium plasmas at atmospheric pressure 4. Applications of plasmas, microelectronics, plasma medicine, nanotechnologies, treatment of materials and other applications. 5. Traps and ionized gases
        Contents of exercises Experiment Seminar, Introduction to scientific wiork
        1. Plasma Electronics: Applications in Microelectronic Device Fabrication T.Makabe Z.Petrović Taylor and Francis, CRC Press, New York (2006).
        2. Principles of Plasma Discharges and Materials Processing Lieberman M A and Lichtenberg A J 2005 2nd edn (Hoboken, NJ: Wiley)
        3. Plasma Chemistry Alexander Fridman Cambridge University Press, May 5, 2008 - 1022 pages
        4. On application of plasmas in nanotechnologies, Zoran Lj. Petrović, Paul Maguire, Marija Radmilović-Rañenović, Maja Radetić, Nevena Puač, Dragana Marić, Charles Mahony, Gordana Malović in "Nanotechnology for Electronics, Photonics, and Renewable Energ
        5. Measurement and interpretation of swarm parameters and their application in plasma modelling Z Lj Petrović, S Dujko, D Marić, G Malović, Ž Nikitović, O Šašić, J Jovanović, V Stojanović and M Radmilović-Radenović J. Phys. D: Appl. Phys. 42 (2009) 194
        Number of hours per week during the semester/trimester/year
        Lectures Exercises OTC Study and Research Other classes
        Methods of teaching Leectures, Discussion, Seminars on specific subjects, discussion with literature, review articles
        Knowledge score (maximum points 100)
        Pre obligations Points Final exam Points
        Activites during lectures 10 Test paper 0
        Practical lessons 20 Oral examination 50
        Colloquia 0
        Seminars 20