OF4MES - Microelectromechanical Systems
|Electrical Engineering and Computing
|Type of study
|bachelor academic studies
|Lecturer (for classes)
|Lecturer/Associate (for practice)
|Lecturer/Associate (for OTC)
|To introduce students to fundamental concepts of micro - and nanofabrication, micro - and nanosystems. To explain pertinent methods of modeling, simulation, fabrication, characterization and application. Introduction into modern trends related with sensors and actuators on micrometer and submicrometer level and into fundamental concepts of microsystem technologies and nanotechnologiy.
|To be acquainted with MEMS and technologies for their fabrication. Developing skills for applying MEMS in various fields, especially in industry, information technology, and biomdeicine. To be acquainted with the modern trends and current problems in this field.
|Contents of lectures
|Introduction. MEMS, NEMS, MOEMS, MST. Materials for MEMS fabrication. MEMS fabrication technologies. Volume and surface micromachining. LIGA process. MEMS control. Concept of electrical and mechanical modeling. Electrostatic sensors and actuators. Thermal sensors and actuators. Piezoelectric sensors and actuators. Magnetic actuators. Microfluidics. Optical MEMS. Numerical modeling of MEMS devices.
|Contents of exercises
|Practices in MEMS modeling and design.
|Number of hours per week during the semester/trimester/year
|Study and Research
|Methods of teaching
|lectures, problem-solving classes, demonstrations
|Knowledge score (maximum points 100)
|Activites during lectures