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13E063MIN - Microelectronics and Nanoelectronics

Course specification
Course title Microelectronics and Nanoelectronics
Acronym 13E063MIN
Study programme Electrical Engineering and Computing
Module Physical Electronics - Biomedical and Nuclear Engineering, Physical Electronics - Nanoelectronics and Photonics, Physical Electronics - Nanoelectronics, Optoelectronics, Laser Technology
Type of study bachelor academic studies
Lecturer (for classes)
Lecturer/Associate (for practice)
Lecturer/Associate (for OTC)
    ESPB 6.0 Status mandatory
    Condition none
    The goal Introducing students to the design and fabrication of microelectronic and nanoelectronic devices and monolithic integrated circuits. Students should get familiar with the functional characteristics of microelectronic and nanoelectronic devices.
    The outcome Students should master fundamentals of planar processes and nanotechnologies, as well as basic principles of bipolar and unipolar silicon devices, heterostructures, and nanoelectronic devices.
    Contents
    URL to the subject page http://nobel.etf.bg.ac.rs/studiranje/kursevi/of3min/
    Contents of lectures Planar processes: diffusion, ion implantation, thermal oxidation, deposition, epitaxy, metallization, lithography, etching, and planarization. Fabrication of bipolar and MOS transistors. Effects in small geometry transistors. Devices based on III-V and II-VI compounds: GaAs, MBE, MOCVD, MESFET. Heterostructure electronic devices: HEMT, HBT, RTD. Graphene and carbon nanotube devices.
    Contents of exercises Solving selected problems.
    Literature
    1. "Mikroelektronika i nanoelektronika-predavanja", M. Tadić, 2011, http://nobel.etf.bg.ac.rs/studiranje/kursevi/of3min/materijali/min_handouts_2011.pdf (Original title)
    2. M. Tadic, R. Ramovic, "Problems in Microelectronics", Akademska misao ETF, Belgrade, 2000.
    3. M. Quirk, J. Serda, "Semiconductor Manufacturing Technology", Pearson, 2001. (Original title)
    4. R. S. Muller and T. I. Kamins, "Device Electronics for Integrated Circuits", Wiley, 2003. (Original title)
    5. G. W. Hanson, "Fundamentals of Nanoelectronics", Prentice Hall, 2007. (Original title)
    Number of hours per week during the semester/trimester/year
    Lectures Exercises OTC Study and Research Other classes
    3 2
    Methods of teaching lectures, problem-solving classes, demonstrations
    Knowledge score (maximum points 100)
    Pre obligations Points Final exam Points
    Activites during lectures 0 Test paper 50
    Practical lessons 0 Oral examination 0
    Projects
    Colloquia 50
    Seminars 0