13E063MIN - Microelectronics and Nanoelectronics
Course specification | ||||
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Course title | Microelectronics and Nanoelectronics | |||
Acronym | 13E063MIN | |||
Study programme | Electrical Engineering and Computing | |||
Module | Physical Electronics - Biomedical and Nuclear Engineering, Physical Electronics - Nanoelectronics and Photonics, Physical Electronics - Nanoelectronics, Optoelectronics, Laser Technology | |||
Type of study | bachelor academic studies | |||
Lecturer (for classes) | ||||
Lecturer/Associate (for practice) | ||||
Lecturer/Associate (for OTC) | ||||
ESPB | 6.0 | Status | mandatory | |
Condition | none | |||
The goal | Introducing students to the design and fabrication of microelectronic and nanoelectronic devices and monolithic integrated circuits. Students should get familiar with the functional characteristics of microelectronic and nanoelectronic devices. | |||
The outcome | Students should master fundamentals of planar processes and nanotechnologies, as well as basic principles of bipolar and unipolar silicon devices, heterostructures, and nanoelectronic devices. | |||
Contents | ||||
URL to the subject page | http://nobel.etf.bg.ac.rs/studiranje/kursevi/of3min/ | |||
Contents of lectures | Planar processes: diffusion, ion implantation, thermal oxidation, deposition, epitaxy, metallization, lithography, etching, and planarization. Fabrication of bipolar and MOS transistors. Effects in small geometry transistors. Devices based on III-V and II-VI compounds: GaAs, MBE, MOCVD, MESFET. Heterostructure electronic devices: HEMT, HBT, RTD. Graphene and carbon nanotube devices. | |||
Contents of exercises | Solving selected problems. | |||
Literature | ||||
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Number of hours per week during the semester/trimester/year | ||||
Lectures | Exercises | OTC | Study and Research | Other classes |
3 | 2 | |||
Methods of teaching | lectures, problem-solving classes, demonstrations | |||
Knowledge score (maximum points 100) | ||||
Pre obligations | Points | Final exam | Points | |
Activites during lectures | 0 | Test paper | 50 | |
Practical lessons | 0 | Oral examination | 0 | |
Projects | ||||
Colloquia | 50 | |||
Seminars | 0 |